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In-Line/in-Situ Metrology Techniques

In-Line/in-Situ Metrology Techniques

1 faculty research In-Line/in-Situ Metrology Techniques on GradNova.

D
Dr. Venkat Selvamanickam

M.D. Anderson Chair Professor of Mechanical & Aerospace Engineering

Department of Electrical and Computer Engineering

University of Houston

Control of Nano-Scale Interfacial and Bulk Defects
Electromagnetic and Electromechanical Properties – Especially at Cryogenic Temperatures
Epitaxial Thin Film Growth by Pvd and Cvd
In-Line/in-Situ Metrology Techniques
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