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Fabrication of Novel Micro and Nano-Sensors and Actuators by Integrating Non-Traditional Materials Using Silicon Planar Microfabrication Techniques and Exploring Phenomenon at the Micro-Nano Interfaces

Fabrication of Novel Micro and Nano-Sensors and Actuators by Integrating Non-Traditional Materials Using Silicon Planar Microfabrication Techniques and Exploring Phenomenon at the Micro-Nano Interfaces

1 faculty research Fabrication of Novel Micro and Nano-Sensors and Actuators by Integrating Non-Traditional Materials Using Silicon Planar Microfabrication Techniques and Exploring Phenomenon at the Micro-Nano Interfaces on GradNova.