GradNova

Home
Find Faculty
Universities
Research
Home
/
Research
/

Technologies for the Monolithic Integration of Sensors and Actuators With Electronics

Technologies for the Monolithic Integration of Sensors and Actuators With Electronics

1 faculty research Technologies for the Monolithic Integration of Sensors and Actuators With Electronics on GradNova.

P
Paul L. Bergstrom

Professor, Electrical and Computer Engineering; Affiliated Professor, Materials Science and Engineering

Department of Electrical and Computer Engineering

Michigan Technological University

Inertial Pressure
Micro-Electromechanical Systems
Micromachining Materials and Process Technologies
Nanoscaled Technologies Enabling Nanoelectronic Devices
+6