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Precision Motion Stages for Semiconductor Metrology

Precision Motion Stages for Semiconductor Metrology

1 faculty research Precision Motion Stages for Semiconductor Metrology on GradNova.

S
Shorya Awtar

Professor, Mechanical Engineering Joseph E. Shigley Collegiate Professor of Engineering

Department of Mechanical Engineering

University of Michigan

Constraint-Based Design
Dynamics of Flexible Systems
Electromagnetic Actuators
Flexure Mechanisms
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